Title :
A comparison of unified vs. segregated automated material handling systems for 300 mm fabs
Author :
Bahri, Namdar ; Reiss, Joe ; Doherty, Brian
Author_Institution :
PRI Autom., Billerica, MA, USA
Abstract :
300 mm fab automation may have to evolve sooner than expected A gradual migration from the traditionally segregated interbay and intrabay automation systems to a unified Automated Material Handling Systems (unified AMHS) has already begun. This study investigates the gains realized by different configurations of unified AMHS over segregated systems. Improved reliability and performance are projected for unified AMHS configurations
Keywords :
industrial control; integrated circuit manufacture; materials handling; reliability; 300 mm; 300 mm fab automation; IC production; direct tool-to-tool transport; segregated automated material handling systems; semiconductor manufacture; unified automated material handling systems; Costs; Design automation; Discrete event simulation; Dispatching; Ergonomics; Logic; Machine vision; Materials handling; Routing; USA Councils;
Conference_Titel :
Semiconductor Manufacturing Symposium, 2001 IEEE International
Conference_Location :
San Jose, CA
Print_ISBN :
0-7803-6731-6
DOI :
10.1109/ISSM.2001.962901
