Title :
Dynamical control method of AMHS for multi-production lines
Author :
Mori, Kazuyuki ; Ono, Akira ; Iwasaki, Junji
Author_Institution :
Mitsubishi Electr. Corp., Hyogo, Japan
Abstract :
This paper presents new control method to manage inter-line material movements in a real fab, and shows that the control method is very effective for material management of multi-production lines through simulation results and actual results applied to real fab
Keywords :
computer aided production planning; dispatching; factory automation; integrated circuit manufacture; production control; WIP state; automated material handling system; balance of utilization rule; decision making; dispatching rules; dynamical control method; inter-line material movements; material management; multi-production lines; process flow; same line precedence rule; semiconductor production systems; simulation; tool utilization rates; Automatic control; Control systems; Dispatching; Industrial electronics; Manufacturing; Materials handling; Production management; Production systems; Productivity; Semiconductor materials;
Conference_Titel :
Semiconductor Manufacturing Symposium, 2001 IEEE International
Conference_Location :
San Jose, CA
Print_ISBN :
0-7803-6731-6
DOI :
10.1109/ISSM.2001.962920
