Title :
Characterization and modeling of on-chip inductor substrate coupling effect
Author :
Chuan-Jane Chao ; Shyh-Chyi Wong ; Chia-Jen Hsu ; Ming-Jer Chen ; Len-Yi Leu
Author_Institution :
Inst. of Electron. Eng., Nat. Chiao Tung Univ., Hsinchu, Taiwan
Abstract :
The substrate coupling effects of two adjacent coplanar spiral inductors are characterized and modeled. The noise magnitude between two 45 /spl mu/m-away inductors can be reduced by 6.83 dB by using guard-ring surrounding each inductor, and improved by 10.28 dB further by adding patterned ground polysilicon shield beneath at 3 GHz. The inductor with patterned polysilicon shield beneath shows improved quality factor and noise isolation. Moreover, a macro model is presented for modeling quality factor and inductance of on-chip spiral inductor and associated neighboring inductor´s coupling noise effect.
Keywords :
CMOS integrated circuits; Q-factor; S-parameters; equivalent circuits; field effect MMIC; inductors; integrated circuit modelling; integrated circuit noise; two-port networks; 3 GHz; CMOS technology; S-parameters; adjacent coplanar spiral inductors; equivalent circuit; guard-ring; inductance; macro model; monolithic RFIC; noise isolation; noise magnitude; on-chip inductor; patterned ground polysilicon shield; quality factor; substrate coupling effects; two-port measurements; CMOS technology; Coils; Dielectric substrates; Frequency; Inductance; Inductors; Q factor; Radiofrequency integrated circuits; Scattering parameters; Spirals;
Conference_Titel :
Radio Frequency Integrated Circuits (RFIC) Symposium, 2002 IEEE
Conference_Location :
Seattle, WA, USA
Print_ISBN :
0-7803-7246-8
DOI :
10.1109/RFIC.2002.1012056
