Title :
New method of extraction of systematic failure component
Author :
Mitsutake, K. ; Ushiku, Y. ; Arakawa, Y. ; Ishibumi, T. ; Ito, O.
Author_Institution :
Process & Manuf. Eng. Center, Toshiba Corp., Yokohama, Japan
Abstract :
We propose a novel model, which can describe systematic faults and is applicable to process improvement. In this model, the histogram of the faults is described as the sum of the Poisson distribution and the negative binomial distribution. The latter originates from the systematic failure component. By combining the analysis of the degree and the position of the systematic fault with a lot history, the problem of the processes can be solved. In this way, it is possible to enhance yield and increase productivity
Keywords :
Poisson distribution; binomial distribution; failure analysis; integrated circuit yield; redundancy; semiconductor process modelling; Agile-Fab concept; IC flexible production; Poisson distribution; fault histogram; lot history; negative binomial distribution; process improvement; productivity improvement; redundancy optimisation; systematic failure component extraction; yield enhancement; yield model; Histograms; History; Indium tin oxide; Manufacturing processes; Optimization methods; Production; Productivity; Redundancy; Semiconductor device manufacture; Virtual manufacturing;
Conference_Titel :
Semiconductor Manufacturing Symposium, 2001 IEEE International
Conference_Location :
San Jose, CA
Print_ISBN :
0-7803-6731-6
DOI :
10.1109/ISSM.2001.962959
