Title :
A 0.35µm 1.25V piezo-resistance digital ROIC for liquid dispensing MEMS
Author :
Dura, R. ; Mathieu, F. ; Nicu, L. ; Murano, F. Perez ; Graells, F. Serra
Author_Institution :
Inst. de Microelectron. de Barcelona, CSIC, Barcelona
Abstract :
A CMOS digital ROIC is presented for multi-channel and differential piezo-resistive sensing, as part of the positioning system of a liquid dispensing MEMS. New very low-voltage and single-battery compatible circuit techniques are proposed for digital gain tuning, pre-amplification and A/D conversion. Also, overall low-power consumption is achieved by operating key devices in subthreshold to prevent from heating the fluidic MEMS. The complete system has been integrated in 0.35 mum CMOS 2-polySi 4-metal technology.
Keywords :
CMOS digital integrated circuits; digital readout; microsensors; piezoresistive devices; CMOS digital ROIC; differential piezo-resistive sensing; liquid dispensing MEMS; piezo-resistance digital ROIC; single-battery compatible circuit techniques; size 0.35 mum; voltage 1.25 V; Batteries; CMOS technology; Circuit optimization; Crosstalk; Heating; Integrated circuit noise; Mechanical sensors; Micromechanical devices; Reservoirs; Thermal stresses;
Conference_Titel :
Circuits and Systems, 2008. ISCAS 2008. IEEE International Symposium on
Conference_Location :
Seattle, WA
Print_ISBN :
978-1-4244-1683-7
Electronic_ISBN :
978-1-4244-1684-4
DOI :
10.1109/ISCAS.2008.4541859
