Title :
Miscorrelation between IEC61000-4-2 type of HMM tester and 50 Ω HMM tester
Author :
Scholz, M. ; Chen, S.-H. ; Johnsson, D. ; Gallerano, A. ; Hellings, G. ; Linten, D. ; Lafonteese, D. ; Concannon, A. ; Vandersteen, G. ; Sawada, M. ; Groeseneken, G.
Author_Institution :
Dept. ELEC, Vrije Univ. Brussels, Brussels, Belgium
Abstract :
Several ESD protection devices are evaluated on-wafer with an IEC61000-4-2 type of HMM tester and a 50 Ω HMM tester. No clear correlation between the two tester models has been obtained. The 50 Ω source impedance triggers different failure modes and even different failure causes.
Keywords :
electrostatic discharge; failure analysis; integrated circuit modelling; integrated circuit reliability; integrated circuit testing; ESD protection devices; HMM tester; IEC61000-4-2; failure modes; human metal model; integrated circuits; on-wafer evaluation; resistance 50 ohm; source impedance triggers; tester models; Current measurement; Electrostatic discharges; Hidden Markov models; Impedance; Stress; Testing; Voltage measurement;
Conference_Titel :
Electrical Overstress/Electrostatic Discharge Symposium (EOS/ESD), 2012 34th
Conference_Location :
Tucson, AZ
Print_ISBN :
978-1-4673-1467-1
