Title :
Compensation for Substrate Permittivity in Probe-Tip Calibration
Author :
Williams, Dylan F. ; Marks, Roger B.
Author_Institution :
National Institute of Standards and Technology, 325 Broadway, Boulder, CO 80303
Abstract :
We demonstrate a method of compensation for the effect of substrate permittivity on coplanar waveguide probe-tip scattering parameter calibrations, modeling the effect as a capacitance at the probe tip. Comparison to on-wafer multiline TRL calibration verifies its accuracy. The method allows calibration to the probe tip using generic off-wafer standards with accuracy comparable to that of on-wafer calibration.
Keywords :
Calibration; Capacitance measurement; Coplanar waveguides; Gallium arsenide; Impedance; Measurement standards; Permittivity measurement; Probes; Scattering parameters; Silicon compounds;
Conference_Titel :
ARFTG Conference Digest-Fall, 44th
Conference_Location :
Boulder, CO, USA
Print_ISBN :
0-7803-5686-1
DOI :
10.1109/ARFTG.1994.327077
