Capacity calculation of an AGV system in a MP2 wafer fab by means of simulation

Author

Ronney, M. ; van der Burgt, M. ; Smit, T. ; Rooda, J.E.

Author_Institution

Eindhoven Univ. of Technol., Netherlands

fYear

2001

fDate

2001

Firstpage

385

Lastpage

388

Abstract

The transport of wafers inside a multiprocess multiproduct wafer factory is a complex logistic process. In Philips´ MOS-3 waferfab this transport is carried out by a so-called automated guided vehicle (AGV) system. In this paper a dynamic model is presented of the AGV system of MOS-3. The advantages of creating such a model are twofold. First of all, the model can be used to analyse the logistics, layout, algorithms and behaviour of the current AGV system. Secondly, the model can analyse and optimise possible changes that can be made to the AGV system in the future

Keywords

automatic guided vehicles; digital simulation; factory automation; integrated circuit manufacture; materials handling; semiconductor process modelling; AGV system; MP2 wafer fab; Philips´ MOS-3 wafer fab; automated guided vehicle; capacity calculation; complex logistic process; dynamic model; multiprocess multiproduct factory; wafer transport; Algorithm design and analysis; Command languages; Joining processes; Layout; Logistics; Power system modeling; Production facilities; Semiconductor device modeling; Vehicle dynamics; Vehicles;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Manufacturing Symposium, 2001 IEEE International

Conference_Location

San Jose, CA

Print_ISBN

0-7803-6731-6

Type

conf

DOI

10.1109/ISSM.2001.962996

Filename

962996