Study and Development of On-Wafer Cryogenic Calibration Techniques

In recent years significant progress has been made in the development of cryogenic, on-wafer probing systems [reference 1-6]. The major shortcoming of previous efforts has been the lack of a repeatable and accurate system yielding results comparable to room temperature systems. A quantitative study must be performed to determine measurement accuracy and repeatability. Most importantly, without such verification and knowledge, researchers have failed to develop effective on-wafer S-parameter and noise parameter calibration techniques. We implement a two-tier calibration algorithm [reference 7] for cryogenic on-wafer calibrations. We demonstrate, for the first time, that cryogenic on-wafer calibrations are quantitatively comparable with room temperature calibration results.