• DocumentCode
    1840382
  • Title

    Process ESD capability measurements

  • Author

    Steinman, Arnold

  • Author_Institution
    Electron. Workshop, Dangelmayer Assoc., Berkeley, CA, USA
  • fYear
    2012
  • fDate
    9-14 Sept. 2012
  • Firstpage
    1
  • Lastpage
    9
  • Abstract
    There are no standards for establishing the capability of equipment or a process to handle devices of known ESD sensitivity. A prior paper established that voltages measured on a device pin could correlate to device testing voltages. This paper makes measurements on different devices and people to compare with voltages and discharges of CDM and HBM testing.
  • Keywords
    electrostatic discharge; CDM discharge; HBM testing; charge device model; device pin; device testing voltages; human body model; process ESD capability measurements; Electrical resistance measurement; Electrostatic discharges; Monitoring; Personnel; Probes; Sensitivity; Voltage measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electrical Overstress/Electrostatic Discharge Symposium (EOS/ESD), 2012 34th
  • Conference_Location
    Tucson, AZ
  • ISSN
    0739-5159
  • Print_ISBN
    978-1-4673-1467-1
  • Type

    conf

  • Filename
    6333294
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1840382