Title :
Process ESD capability measurements
Author :
Steinman, Arnold
Author_Institution :
Electron. Workshop, Dangelmayer Assoc., Berkeley, CA, USA
Abstract :
There are no standards for establishing the capability of equipment or a process to handle devices of known ESD sensitivity. A prior paper established that voltages measured on a device pin could correlate to device testing voltages. This paper makes measurements on different devices and people to compare with voltages and discharges of CDM and HBM testing.
Keywords :
electrostatic discharge; CDM discharge; HBM testing; charge device model; device pin; device testing voltages; human body model; process ESD capability measurements; Electrical resistance measurement; Electrostatic discharges; Monitoring; Personnel; Probes; Sensitivity; Voltage measurement;
Conference_Titel :
Electrical Overstress/Electrostatic Discharge Symposium (EOS/ESD), 2012 34th
Conference_Location :
Tucson, AZ
Print_ISBN :
978-1-4673-1467-1
