Title :
Implementing air ionizing blower at KLA Tencor 2401 metrology tool reduce visual inspection failure for semiconductor wafers
Author :
Razman, Harriman ; Adris, Mohd Faizal ; Woon, Cha Tree Tow
Author_Institution :
Silterra Malaysia Sdn. Bhd, Kulim, Malaysia
Abstract :
This paper describes the methodologies used for implementing an effective air-ionizing blower within a KLA Tencor 2410 (Viper) metrology tool for removing particles from outgoing wafers. After the implementation of this air-ionizing blower, wafer lot visual inspection failures decreased from 21.4% to 4.1% in Q2´2011.
Keywords :
failure analysis; inspection; ionisation; semiconductor technology; KLA Tencor 2401 metrology tool; Viper metrology tool; air ionizing blower; outgoing wafers; semiconductor wafers; visual inspection failure; Force; Inspection; Manifolds; Metrology; Surface treatment; Visualization; Voltage measurement;
Conference_Titel :
Electrical Overstress/Electrostatic Discharge Symposium (EOS/ESD), 2012 34th
Conference_Location :
Tucson, AZ
Print_ISBN :
978-1-4673-1467-1
