Title :
A μ-TLP system realized in MEMS technology
Author :
Tazzoli, Augusto ; Giovampaola, Cristian Della
Author_Institution :
Dept. of Electr. & Syst. Eng., Univ. of Pennsylvania, Philadelphia, PA, USA
Abstract :
This work reports on a fully integrated μ-TLP system realized in MEMS technology. The proposed solution shows exceptionally low parasitics, and generates very fast pulses with fast rise times and high repetition rate. This system can be used for the testing of very sensitive devices, like MR heads or MEMS/NEMS.
Keywords :
electrostatic discharge; micromechanical devices; transmission lines; ESD; MEMS technology; MEMS-NEMS; MR heads; fully integrated μ-TLP system; transmission line pulser system; very sensitive devices; Conductors; Coplanar waveguides; Optical switches; Power transmission lines; Resistors; Transmission line measurements;
Conference_Titel :
Electrical Overstress/Electrostatic Discharge Symposium (EOS/ESD), 2012 34th
Conference_Location :
Tucson, AZ
Print_ISBN :
978-1-4673-1467-1
