Bulk acoustic wave resonators and filters for applications above 2 GHz

Author

Lakin, K.M. ; Belsick, J.R. ; McDonald, J.P. ; McCarron, K.T. ; Andrus, C.W.

Author_Institution

TFR Technol., Inc., Bend, OR, USA

Volume

3

fYear

2002

fDate

2-7 June 2002

Firstpage

1487

Abstract

Bulk acoustic wave (BAW) devices are of interest for applications at higher microwave frequencies above 2 GHz. As frequencies increase, BAW devices require thinner films which decreases processing times and makes the technology more cost effective. However, the area of resonators and associated filters also decreases and begins to impact device performance and packaging requirements. This paper summarizes the technical requirements of BAW devices in the 2 to 20 GHz frequency range and shows specific results for resonators, ladder filters, and stacked crystal filters operating up to 20 GHz.

Keywords

acoustic filters; acoustic microwave devices; acoustic resonators; bulk acoustic wave devices; crystal filters; crystal resonators; ladder filters; microwave filters; 2 to 20 GHz; BAW filters; BAW resonators; bulk acoustic wave filters; bulk acoustic wave resonators; cost effective technology; device area; device performance; frequency range; ladder filters; microwave frequencies; packaging requirements; piezoelectric thin films; processing times; stacked crystal filters; technical requirements; Acoustic waves; Bulk acoustic wave devices; Electrodes; Equivalent circuits; Microwave filters; Microwave frequencies; Optical resonators; Piezoelectric films; Resonant frequency; Resonator filters;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Symposium Digest, 2002 IEEE MTT-S International

Conference_Location

Seattle, WA, USA

ISSN

0149-645X

Print_ISBN

0-7803-7239-5

Type

conf

DOI

10.1109/MWSYM.2002.1012137

Filename

1012137