Title :
Bulk acoustic wave resonators and filters for applications above 2 GHz
Author :
Lakin, K.M. ; Belsick, J.R. ; McDonald, J.P. ; McCarron, K.T. ; Andrus, C.W.
Author_Institution :
TFR Technol., Inc., Bend, OR, USA
Abstract :
Bulk acoustic wave (BAW) devices are of interest for applications at higher microwave frequencies above 2 GHz. As frequencies increase, BAW devices require thinner films which decreases processing times and makes the technology more cost effective. However, the area of resonators and associated filters also decreases and begins to impact device performance and packaging requirements. This paper summarizes the technical requirements of BAW devices in the 2 to 20 GHz frequency range and shows specific results for resonators, ladder filters, and stacked crystal filters operating up to 20 GHz.
Keywords :
acoustic filters; acoustic microwave devices; acoustic resonators; bulk acoustic wave devices; crystal filters; crystal resonators; ladder filters; microwave filters; 2 to 20 GHz; BAW filters; BAW resonators; bulk acoustic wave filters; bulk acoustic wave resonators; cost effective technology; device area; device performance; frequency range; ladder filters; microwave frequencies; packaging requirements; piezoelectric thin films; processing times; stacked crystal filters; technical requirements; Acoustic waves; Bulk acoustic wave devices; Electrodes; Equivalent circuits; Microwave filters; Microwave frequencies; Optical resonators; Piezoelectric films; Resonant frequency; Resonator filters;
Conference_Titel :
Microwave Symposium Digest, 2002 IEEE MTT-S International
Conference_Location :
Seattle, WA, USA
Print_ISBN :
0-7803-7239-5
DOI :
10.1109/MWSYM.2002.1012137
