Title :
Quasi-optical E-band MEMS switching arrays
Author :
Zhang, W.-K. ; Fan Jiang ; Domier, C.W. ; Luhmann, N.C., Jr.
Author_Institution :
Dept. of Appl. Sci., California Univ., Davis, CA, USA
Abstract :
This paper presents modeling, design, fabrication, and testing of an E-band MEMS based quasi-optical switching array. The quasi-optical MEMS switching array has been demonstrated with an isolation of better than 10 dB from 70/spl sim/85 GHz. The maximum demonstrated ON /OFF ratio is over 15 dB at 76 GHz.
Keywords :
micromechanical devices; microwave switches; 70 to 85 GHz; ON/OFF ratio; isolation; quasi-optical E-band MEMS switching array; Biomembranes; Bridge circuits; Capacitance; Dielectric substrates; Micromechanical devices; Microswitches; Microwave antenna arrays; Radiofrequency microelectromechanical systems; Switches; Telecommunication switching;
Conference_Titel :
Microwave Symposium Digest, 2002 IEEE MTT-S International
Conference_Location :
Seattle, WA, USA
Print_ISBN :
0-7803-7239-5
DOI :
10.1109/MWSYM.2002.1012147
