Title :
High precision control for piezo-actuated XY-table
Author_Institution :
Dept. of Electron. Inf. Syst., Shibaura Inst. of Technol., Saitama, Japan
Abstract :
The piezo-actuated XY-table is composed of two piezo electric actuators (PEA) and a positioning mechanism (PM). Due to existence of hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control for the XY-table is a challenging task. This paper discusses the high precision adaptive control for the XY-table, where the hysteresis is described by Prandtl-Ishlinskii model. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. Experimental results show the effectiveness of the proposed method.
Keywords :
adaptive control; control nonlinearities; friction; hysteresis; piezoelectric actuators; position control; stability; PEA; PM; Prandtl-Ishlinskii model; control law; friction; global stability; high precision adaptive control; hysteretic nonlinearity; piezoactuated XY-table; piezoelectric actuator; position error; positioning mechanism; zero asymptotic control;
Conference_Titel :
Robotics and Biomimetics (ROBIO), 2012 IEEE International Conference on
Conference_Location :
Guangzhou
Print_ISBN :
978-1-4673-2125-9
DOI :
10.1109/ROBIO.2012.6491326
