DocumentCode
1842224
Title
A parallel measurement system for the extraction of level 3 SPICE parameters
Author
Walker, A.A. ; Touhy, P. ; Walton, A.J. ; Robertson, J.M.
Author_Institution
Dept. of Electr. Eng., Edinburgh Univ., UK
fYear
1990
fDate
5-7 March 1990
Firstpage
135
Lastpage
140
Abstract
A fast and cost-efficient system to measure level-3 SPICE parameters is described. The extraction process takes 30 measurements in 18 measurement cycles using six MOSFETs and an oxide capacitor. Many of the measurements are performed in parallel and this significantly reduces the combined measurement and extraction time.<>
Keywords
insulated gate field effect transistors; measurement systems; semiconductor device models; MOSFETs; cost-efficient system; extraction of level 3 SPICE parameters; oxide capacitor; parallel measurement system; parameter extraction; Capacitance measurement; Capacitors; Circuits; MOSFETs; Optimization methods; Performance evaluation; SPICE; Thickness measurement; Time measurement; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectronic Test Structures, 1990. ICMTS 1990. Proceedings of the 1990 International Conference on
Conference_Location
San Diego, CA, USA
Type
conf
DOI
10.1109/ICMTS.1990.67893
Filename
67893
Link To Document