Title :
A parallel measurement system for the extraction of level 3 SPICE parameters
Author :
Walker, A.A. ; Touhy, P. ; Walton, A.J. ; Robertson, J.M.
Author_Institution :
Dept. of Electr. Eng., Edinburgh Univ., UK
Abstract :
A fast and cost-efficient system to measure level-3 SPICE parameters is described. The extraction process takes 30 measurements in 18 measurement cycles using six MOSFETs and an oxide capacitor. Many of the measurements are performed in parallel and this significantly reduces the combined measurement and extraction time.<>
Keywords :
insulated gate field effect transistors; measurement systems; semiconductor device models; MOSFETs; cost-efficient system; extraction of level 3 SPICE parameters; oxide capacitor; parallel measurement system; parameter extraction; Capacitance measurement; Capacitors; Circuits; MOSFETs; Optimization methods; Performance evaluation; SPICE; Thickness measurement; Time measurement; Voltage;
Conference_Titel :
Microelectronic Test Structures, 1990. ICMTS 1990. Proceedings of the 1990 International Conference on
Conference_Location :
San Diego, CA, USA
DOI :
10.1109/ICMTS.1990.67893
