Title :
SCANNING PROBE MICROSCOPY APPLICATIONS TO CHARACTERIZATION IN MICROELECTRONICS
Author :
Wu, J.W. ; Yang, X.M. ; Zhu, W.M. ; Zhu, F.S. ; Lu, Z.H. ; Wei, Y.
Keywords :
Atomic force microscopy; Clouds; Magnetic force microscopy; Microelectronics; Scanning probe microscopy; Silicon; Size measurement; Surface morphology; Surface topography; Tunneling;
Conference_Titel :
Solid-State and Integrated Circuit Technology, 1995 4th International Conference on
Print_ISBN :
0-7803-3062-5
DOI :
10.1109/ICSICT.1995.503681
