• DocumentCode
    1842649
  • Title

    Test structures and finite element models for chip stress and plastic package reliability

  • Author

    Pendse, Raj ; Demmin, Jeffrey

  • Author_Institution
    Nat. SemiCond. corp., Santa Clara, CA, USA
  • fYear
    1990
  • fDate
    5-7 March 1990
  • Firstpage
    155
  • Lastpage
    160
  • Abstract
    Failure modes induced by plastic package stress in multilayer metal-dielectric-passivation structures in large chips are investigated. An arrayable test chip is designed to contain representative metal-dielectric configurations that lend themselves to simple electrical measurement of stress-induced failures such as metal-to-metal leakage caused by interlayer dielectric cracking. Extensive data on the effects of chip size, distance from the corner, metal geometry, temperature cycling, and assembly variables are generated using the test chip. The failure modes are investigated using finite-element modeling (FEM). A modeling technique is used to address the problem of corner singularities, which is encountered in calculating shear stresses near chip corners. An approach is developed to derive die design rules using the accelerated failure rate data generated by the test chip in conjunction with the FEM stress curves. Some simple solutions to the package stress problem are demonstrated.<>
  • Keywords
    VLSI; finite element analysis; integrated circuit technology; packaging; reliability; stress analysis; FEM stress curves; VLSI; accelerated failure rate data; arrayable test chip; assembly variables; chip stress; corner singularities; die design rules; distance from the corner; effects of chip size; electrical measurement; failure modes; finite element models; finite-element modeling; interlayer dielectric cracking; large chips; metal geometry; metal-to-metal leakage; modeling technique; multilayer metal-dielectric-passivation structures; package stress problem; package stress solutions; plastic package reliability; plastic package stress; shear stresses; stress-induced failures; temperature cycling; test chip; Dielectric measurements; Electric variables measurement; Finite element methods; Geometry; Nonhomogeneous media; Plastic packaging; Semiconductor device measurement; Stress measurement; Temperature; Testing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microelectronic Test Structures, 1990. ICMTS 1990. Proceedings of the 1990 International Conference on
  • Conference_Location
    San Diego, CA, USA
  • Type

    conf

  • DOI
    10.1109/ICMTS.1990.67896
  • Filename
    67896