Title :
Hybrid opto-electronic sensor system on silicon
Author :
Joppe, J.L. ; Stoffer, R. ; Lambeck, P.V.
Author_Institution :
TNO Phys. & Electron. Lab., The Hague, Netherlands
Abstract :
A general sensor system based on integrated opto-electronic integration on silicon is proposed. The system is based on newly developed schemes for the hybrid integration of semiconductor lasers, silicon photodetectors and ZnO optical waveguides on silicon
Keywords :
integrated optoelectronics; Si; ZnO; ZnO optical waveguides; general sensor system; hybrid opto-electronic sensor system; integrated opto-electronic integration; semiconductor lasers; silicon; silicon photodetectors;
Conference_Titel :
Planar Silicon Hybrid Optoelectronics (Digest No. 1994/198), IEE Colloquium on
Conference_Location :
London
