Components for an onboard optical communication structure for silicon circuits

Author

Federighi, Marco ; Kenyon, Tony ; Massarek, Ilana ; Pitt, Chris ; Pradissitto, Jasmine ; Robinson, Henry ; Trwoga, Phil

Author_Institution

Dept. of Electron. & Electr. Eng., Univ. Coll. London, UK

fYear

1994

fDate

34631

Firstpage

42552

Lastpage

42555

Abstract

This paper reports progress in developing material systems for three components which may have the potential to provide part of an on-chip optical communication network for silicon integrated circuits. The type of network envisaged comprises a distributed optical waveguide network sited within the multilayer dielectric-metallisation component interconnection scheme on a VLSI wafer

Keywords

integrated circuit metallisation; Si; VLSI wafer; distributed optical waveguide network; material systems; multilayer dielectric-metallisation component interconnection scheme; on-chip optical communication network; onboard optical communication structure; silicon circuits; silicon integrated circuits;

fLanguage

English

Publisher

iet

Conference_Titel

Planar Silicon Hybrid Optoelectronics (Digest No. 1994/198), IEE Colloquium on

Conference_Location

London

Type

conf

Filename

678964

Link To Document

https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1842809