Title :
Array diagnostic monitor-a DRAM technology development vehicle
Author :
Paggi, Matthew ; Sprogis, Edmund ; Richard, Glen ; Newhart, Ronald E.
Author_Institution :
IBM, Essex Junction, VT, USA
Abstract :
An array diagnostic monitor (ADM) is described which is useful in the early stages of dynamic random access memory (DRAM) technology development. The ADM´s unique feature is that it has key diagnostic capabilities designed in parallel with full AC testability. This enables the monitor to be used for defect identification and diagnostic, electrical cell characterization, and process line monitoring. The value of the ADM is demonstrated in early defect detection before sufficient quality hardware is available and in providing rapid feedback to the process development line.<>
Keywords :
MOS integrated circuits; integrated circuit technology; integrated circuit testing; integrated memory circuits; random-access storage; DRAM technology development vehicle; array diagnostic monitor; defect identification; dynamic random access memory; early defect detection; electrical cell characterization; feature; full AC testability; key diagnostic capabilities; process development line; process line monitoring; rapid feedback; Add-drop multiplexers; Circuit testing; Hardware; Isolation technology; Monitoring; Optical arrays; Optical feedback; Performance evaluation; Random access memory; Vehicles;
Conference_Titel :
Microelectronic Test Structures, 1990. ICMTS 1990. Proceedings of the 1990 International Conference on
Conference_Location :
San Diego, CA, USA
DOI :
10.1109/ICMTS.1990.67897
