Array diagnostic monitor-a DRAM technology development vehicle

Author

Paggi, Matthew ; Sprogis, Edmund ; Richard, Glen ; Newhart, Ronald E.

Author_Institution

IBM, Essex Junction, VT, USA

fYear

1990

fDate

5-7 March 1990

Firstpage

163

Lastpage

167

Abstract

An array diagnostic monitor (ADM) is described which is useful in the early stages of dynamic random access memory (DRAM) technology development. The ADM´s unique feature is that it has key diagnostic capabilities designed in parallel with full AC testability. This enables the monitor to be used for defect identification and diagnostic, electrical cell characterization, and process line monitoring. The value of the ADM is demonstrated in early defect detection before sufficient quality hardware is available and in providing rapid feedback to the process development line.<>

Keywords

MOS integrated circuits; integrated circuit technology; integrated circuit testing; integrated memory circuits; random-access storage; DRAM technology development vehicle; array diagnostic monitor; defect identification; dynamic random access memory; early defect detection; electrical cell characterization; feature; full AC testability; key diagnostic capabilities; process development line; process line monitoring; rapid feedback; Add-drop multiplexers; Circuit testing; Hardware; Isolation technology; Monitoring; Optical arrays; Optical feedback; Performance evaluation; Random access memory; Vehicles;

fLanguage

English

Publisher

ieee

Conference_Titel

Microelectronic Test Structures, 1990. ICMTS 1990. Proceedings of the 1990 International Conference on

Conference_Location

San Diego, CA, USA

Type

conf

DOI

10.1109/ICMTS.1990.67897

Filename

67897