Title :
A technique for characterizing AC performance with a DC parametric tester
Author :
Merrill, Richard ; Issaq, Enayet ; Gomersal, Edson
Author_Institution :
Nat. Semicond. Fairchild Res. Center, Santa Clara, CA, USA
Abstract :
A method for measuring circuit propagation delays with a DC parametric tester is demonstrated. The technique is suitable for any normal production electrical test operation. Experimental results that demonstrate exceptional accuracy (<3% error) are presented. Possible applications include improved final test yield, improved feedback to foundry on AC results, and inclusion of AC parameters in the electrical specification of the process in addition to the traditional DC parameters. The test structure consists of an on-chip CMOS ring oscillator and F/V convertor.<>
Keywords :
CMOS integrated circuits; integrated circuit technology; integrated circuit testing; oscillators; voltage-frequency convertors; CMOS ring oscillator; DC parametric tester; F/V convertor; accuracy; characterizing AC performance; circuit propagation delay measurement; feedback to foundry on AC results; final test yield; frequency voltage convertor; production electrical test; test structure; Assembly; Capacitors; Circuit optimization; Circuit testing; Costs; Electric variables measurement; Foundries; Integrated circuit interconnections; Semiconductor device testing; Threshold voltage;
Conference_Titel :
Microelectronic Test Structures, 1990. ICMTS 1990. Proceedings of the 1990 International Conference on
Conference_Location :
San Diego, CA, USA
DOI :
10.1109/ICMTS.1990.67908
