• DocumentCode
    1844135
  • Title

    Microwave On-Wafer Measurements with Active Needle Probe Tips

  • Author

    Heuermann, Holger

  • Author_Institution
    Rosenberger HF-Technik, 84526 Tittmoning, Germany
  • Volume
    31
  • fYear
    1997
  • fDate
    35582
  • Firstpage
    208
  • Lastpage
    214
  • Abstract
    This paper presents new microwave probe tips for on-wafer measurements. These so-called needle probe tips have heads with two or three special needles, which can be changed and provide direct viewing. Additionally, these probe tips allow to implement passiv or activ circuits in the probe. The performance of this new probe tip concept is explained at first. HFSS simulations up to 50 GHz show the good performance of all of the components of these needle probe tips.
  • Keywords
    Circuits; Coaxial components; Contacts; Coplanar waveguides; Impedance; MMICs; Microwave measurements; Needles; Probes; Stripline;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    ARFTG Conference Digest-Spring, 49th
  • Conference_Location
    Denver, CO, USA
  • Print_ISBN
    0-7803-5686-1
  • Type

    conf

  • DOI
    10.1109/ARFTG.1997.327230
  • Filename
    4119915
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1844135