Title :
On the study of anomalous skin effect for GSI interconnections
Author :
Sarvari, Reza ; Meindl, James D.
Author_Institution :
Microelectron. Res. Center, Georgia Inst. of Technol., Atlanta, GA, USA
Abstract :
The change in the resistivity of a thin wire caused by anomalous skin effect (combined surface scattering and skin effect) is studied. The delay of a digital transmission line due to this effect is modeled. The results show that for a wire in the RC region surface scattering has the major effect on the delay whereas for a wire between the RC and RLC regions both surface scattering and skin effect should be considered.
Keywords :
VLSI; anomalous skin effect; electrical resistivity; integrated circuit interconnections; surface scattering; GSI interconnections; RC region; RLC region; anomalous skin effect; digital transmission; resistivity; surface scattering; Conductivity; Delay effects; Electrons; Frequency; Grain boundaries; Scattering; Skin effect; Surface resistance; Transistors; Wire;
Conference_Titel :
Interconnect Technology Conference, 2003. Proceedings of the IEEE 2003 International
Print_ISBN :
0-7803-7797-4
DOI :
10.1109/IITC.2003.1219707
