Title :
Lumped-Element Impedance Standards
Author :
Williams, Dylan F. ; Walker, David K.
Author_Institution :
National Institute of Standards and Technology, 325 Broadway, Boulder, CO 80303, Ph: [+1] (303)497-3138 Fax: [+1] (303) 497-3122 E-mail: dylan@boulder.nist.gov
Abstract :
We measure the electrical parameters of commercial lumped-element impedance standards manufactured for the calibration of on-wafer probing systems. The standard¿s impedance depends not only on the standard itself, but also on probe placement, probe construction, and the reference calibration.
Keywords :
Calibration; Ceramics; Coaxial components; Coplanar waveguides; Electric variables measurement; Impedance measurement; Measurement standards; Probes; Resistors; Transmission line measurements;
Conference_Titel :
ARFTG Conference Digest-Spring, 51st
Conference_Location :
Baltimore, MD, USA
Print_ISBN :
0-7803-5686-1
DOI :
10.1109/ARFTG.1998.327285
