Title :
Accurate Characteristic Impedance Measurement on Silicon
Author :
Williams, Dylan F. ; Arz, Uwe ; Grabinski, Hartmut
Author_Institution :
National Institute of Standards and Technology, 325 Broadway, Boulder, CO 80303 Ph: [+1] (303)497-3138 Fax: [+1] (303) 497-3122 E-mail: dylan@boulder.nist.gov
Abstract :
This paper presents a new method that accurately determines the characteristic impedance of planar transmission lines printed on lossy dielectrics even when contact-pad capacitance and conductance are large. We demonstrate the method on a coplanar waveguide fabricated on fused silica and a microstrip line fabricated on a highly conductive silicon substrate.
Keywords :
Calibration; Capacitance measurement; Coplanar waveguides; Dielectric substrates; Impedance measurement; Microstrip; Parasitic capacitance; Propagation losses; Silicon; Transmission line measurements;
Conference_Titel :
ARFTG Conference Digest-Spring, 51st
Conference_Location :
Baltimore, MD, USA
Print_ISBN :
0-7803-5686-1
DOI :
10.1109/ARFTG.1998.327296
