Title :
VNA Calset Port Augmentation for Impedance Matching Probe Calibration
Author_Institution :
Cascade Microtech, Inc., 2430 NW 206th Ave., Beaverton, OR 97060
Abstract :
A method for calibrating an on-wafer VNA measurement system with unequal port impedances determined by impedance matching probes is presented. The method starts with an existing stored calibration set for measurement reference planes at the ends of the coaxial cables. A new calibration set with a probe-tip reference plane is determined through a calibration set augmentation procedure using measured two-port normalized S-parameters of each probe.
Keywords :
Calibration; Circuits; Coaxial cables; Coaxial components; Impedance matching; Impedance measurement; Probes; Reflection; Scattering parameters; Tuners;
Conference_Titel :
ARFTG Conference Digest-Spring, 53rd
Conference_Location :
Anaheim, CA, USA
Print_ISBN :
0-7803-5686-1
DOI :
10.1109/ARFTG.1999.327345
