DocumentCode
1846811
Title
VNA Calset Port Augmentation for Impedance Matching Probe Calibration
Author
Hayden, Leonard
Author_Institution
Cascade Microtech, Inc., 2430 NW 206th Ave., Beaverton, OR 97060
Volume
35
fYear
1999
fDate
36312
Firstpage
1
Lastpage
5
Abstract
A method for calibrating an on-wafer VNA measurement system with unequal port impedances determined by impedance matching probes is presented. The method starts with an existing stored calibration set for measurement reference planes at the ends of the coaxial cables. A new calibration set with a probe-tip reference plane is determined through a calibration set augmentation procedure using measured two-port normalized S-parameters of each probe.
Keywords
Calibration; Circuits; Coaxial cables; Coaxial components; Impedance matching; Impedance measurement; Probes; Reflection; Scattering parameters; Tuners;
fLanguage
English
Publisher
ieee
Conference_Titel
ARFTG Conference Digest-Spring, 53rd
Conference_Location
Anaheim, CA, USA
Print_ISBN
0-7803-5686-1
Type
conf
DOI
10.1109/ARFTG.1999.327345
Filename
4120038
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