Title :
The effect of load variations on on-wafer lumped element based calibrations
Author :
Kirby, Pete ; Dunleavy, Lawrence ; Weller, Thomas
Author_Institution :
University of South Florida, Wireless and Microwave (WAMI) Program, Tampa, Florida
Abstract :
We present a study of DC and RF measured variations in the resistance of loads that are to be used for on-wafer calibrations on GaAs substrates. The impact on measurement-based calibration definitions, and the calibration errors arising from neglecting the variations will be explored. Promising solutions for accommodating the variations into accurate on-wafer calibration strategies are advanced based on the use of the dc resistance of the load standard to aid in the calibration standard definition process.
Keywords :
Calibration; Character generation; Coplanar waveguides; Electrical resistance measurement; Gallium arsenide; Load management; MMICs; Production; Resistors; Transistors;
Conference_Titel :
ARFTG Conference Digest-Spring, 54th
Conference_Location :
Atlanta, GA, USA
Print_ISBN :
0-7803-5686-1
DOI :
10.1109/ARFTG.1999.327368
