DocumentCode
1848290
Title
An improved focus measure for MEMS assembly
Author
Jiang, Zemin ; Xu, De ; Tan, Min ; Xie, Hui
Author_Institution
Key Lab. of Complex Syst. & Intelligence Sci., Chinese Acad. of Sci., Beijing, China
Volume
2
fYear
2005
fDate
29 July-1 Aug. 2005
Firstpage
1118
Abstract
In this paper, the micromanipulation system for the MEMS assembly is constructed. An improved focus measure and clamping strategy are proposed for the assembly of the MEMS. The focus measure is used to focusing the miniaturized gear and clamp images, and the clamping strategy is used to obtain the miniaturized gear Z-directional information between the gear and clam and assemble the planetary gears. Experiments show the good performance of the algorithm and strategy.
Keywords
clamps; gears; industrial manipulators; microassembling; micromanipulators; nanotechnology; MEMS assembly; clamping strategy; focus measure; micro vision; micromanipulation system; miniaturized gear Z-directional information; planetary gears; Apertures; Clamps; Extraterrestrial measurements; Focusing; Frequency; Gears; Lenses; Micromechanical devices; Microscopy; Robotic assembly;
fLanguage
English
Publisher
ieee
Conference_Titel
Mechatronics and Automation, 2005 IEEE International Conference
Print_ISBN
0-7803-9044-X
Type
conf
DOI
10.1109/ICMA.2005.1626708
Filename
1626708
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