Title :
An improved focus measure for MEMS assembly
Author :
Jiang, Zemin ; Xu, De ; Tan, Min ; Xie, Hui
Author_Institution :
Key Lab. of Complex Syst. & Intelligence Sci., Chinese Acad. of Sci., Beijing, China
fDate :
29 July-1 Aug. 2005
Abstract :
In this paper, the micromanipulation system for the MEMS assembly is constructed. An improved focus measure and clamping strategy are proposed for the assembly of the MEMS. The focus measure is used to focusing the miniaturized gear and clamp images, and the clamping strategy is used to obtain the miniaturized gear Z-directional information between the gear and clam and assemble the planetary gears. Experiments show the good performance of the algorithm and strategy.
Keywords :
clamps; gears; industrial manipulators; microassembling; micromanipulators; nanotechnology; MEMS assembly; clamping strategy; focus measure; micro vision; micromanipulation system; miniaturized gear Z-directional information; planetary gears; Apertures; Clamps; Extraterrestrial measurements; Focusing; Frequency; Gears; Lenses; Micromechanical devices; Microscopy; Robotic assembly;
Conference_Titel :
Mechatronics and Automation, 2005 IEEE International Conference
Print_ISBN :
0-7803-9044-X
DOI :
10.1109/ICMA.2005.1626708
