Title :
Investigating the thermal response of a micro-optical shutter
Author :
Wong, C. Channy ; Graham, Samuel
Author_Institution :
Sandia Nat. Labs., Albuquerque, NM, USA
Abstract :
This paper discusses the thermal analysis of a fully integrated micro-switch for surety applications. Specifically, this study focuses on the temperature increase of a micromachined optical shutter with spot heating from a micro-laser. To analyze the shutter response, a ´Design-to-Analysis´ interface has been built that generates an accurate 3-D solid geometry from the 2-D mask layout. Besides performing analysis, engineers can also use this solid modeler to virtually prototype and verify a design before fabrication. A parametric study is performed to determine the effects of thermal conductivity and contact resistance on the thermal response of this passively cooled device.
Keywords :
micro-optics; optical design techniques; optical elements; optical switches; reliability; solid modelling; thermal conductivity; thermal management (packaging); thermal resistance; transient response; 2-D mask layout; 3-D solid geometry; MOEMS; VCSEL; contact resistance; continuum level modeling; design-to-analysis interface; energy balance; fully integrated microswitch; micromachined optical shutter; passively cooled device; reliability; solid modeler; spot heating; surety applications; temperature increase; thermal conductivity; thermal management; transient response; Design engineering; Geometrical optics; Heating; Microswitches; Performance analysis; Solid modeling; Temperature; Thermal conductivity; Thermal resistance; Virtual prototyping;
Conference_Titel :
Thermal and Thermomechanical Phenomena in Electronic Systems, 2002. ITHERM 2002. The Eighth Intersociety Conference on
Print_ISBN :
0-7803-7152-6
DOI :
10.1109/ITHERM.2002.1012576
