Picosecond pulse propagation images and oppositely polarized pulse shapes on CPS lines measured by a Scanning Force Optoelectronic Microscope

Author

Kasahara, Yukio ; Takeuchi, Koichiro ; Mizuhara, Akira ; Mizuno, Koji

Author_Institution

TERATEC Corporation, 2-9-32 Naka-cho, Musashino-shi, Tokyo 180-8750, Japan, phone: +81-422-52-2102, fax: +81-422-52-2125, e-mail: kasahara@teratec.yokogawa.co.jp

Volume

38

fYear

2000

fDate

Nov. 2000

Firstpage

1

Lastpage

4

Abstract

We have developed a novel ultra-fast voltage measurement system, the scanning force optoelectronic microscope (SFOEM), by integrating a scanning force microscope (SFM) and an optical sampling technique. This paper describes a method by which a 2ps pulse propagation image directed along the edge of a coplanar strip (CPS) has been recorded using the SFOEM. It also describes how oppositely polarized pulses on each line of the CPS were measured by the SFOEM. These results demonstrate that the SFOEM is a useful tool not only for measuring ultra-fast voltage and pulse propagation images but also for analyzing the operation of ultra-fast LSI devices.

Keywords

Force measurement; Optical microscopy; Optical polarization; Optical propagation; Optical pulse shaping; Optical pulses; Pulse measurements; Pulse shaping methods; Shape measurement; Voltage measurement; CPS; LT-GaAs; SFM; STM; oppositely polarized pulse shapes; optical sampling; pulse propagation image;

fLanguage

English

Publisher

ieee

Conference_Titel

ARFTG Conference Digest-Fall, 56th

Conference_Location

Boulder, AZ, USA

Print_ISBN

0-7803-5686-1

Type

conf

DOI

10.1109/ARFTG.2000.327438

Filename

4120137