Title :
Recent trends in optical MEMS for telecommunication applications
Abstract :
Recent progress in the development of the optical micro-electro-mechanical systems (MEMS) is reviewed with emphasis on their applications in the field of telecommunications. Both the scientific and the industrial aspects of the components are considered. Different structures are reported and, when necessary, briefly explained showing the main difficulties in development as well as state of the art performance. The possibility of industrialization has gained special interest in our discussion.
Keywords :
micromachining; micromechanical devices; optical attenuators; optical communication equipment; optical filters; optical switches; industrial aspects; industrialization; optical MEMS; optical micro-electro-mechanical systems; scientific aspects; telecommunication applications; Microelectromechanical systems; Micromechanical devices;
Conference_Titel :
Photonics and Its Application, 2004. The Fourth Workshop on
Print_ISBN :
977-5031-78-8
DOI :
10.1109/PAIA.2004.1353817
