Proposal of novel rolling friction compensation with data-based friction model for ball screw driven stage

This paper presents a novel compensation of rolling friction for ball screw driven stage. Recent years, many kinds of friction models based on complicated equations are studied. However, it is difficult to treat friction models based on equations. The reasons are that precise modeling which represents the real friction characteristic and parameter tuning are difficult. In this paper, a model based on the measurement friction with no equation is proposed to solve these problems. Moreover, high-speed positioning is achieved by combining the proposed model and an iterative learning control. Finally, simulations and experiments are performed to show the advantages of the proposed method.