Title :
Mems-based mechanically tunable flexible photonic crystal
Author :
Cui, Y.H. ; Wu, Q. ; Park, W. ; Jeon, J. ; Kim, M.J. ; Lee, J.-B.
Author_Institution :
Dept. of Electr. Eng., Univ. of Texas at Dallas, Richardson, TX, USA
Abstract :
We report design, fabrication and characterization of a MEMS-based tunable flexible photonic crystal, which is comprised of a periodic array of 290 nm diameter high-index (3.46) silicon rod embedded in a low-index (1.56) SU-8. A couple of chevron electro-thermal actuators are attached to the flexible photonic crystal and tunability is achieved by mechanical force generated by the actuators. The mechanical stress induces changes in the periodicity of the photonic crystal and consequently modifies the photonic band structure. To the best of our knowledge, this is the first ever experimental demonstration of mechanically tunable photonic crystal based on MEMS electro-thermal actuators.
Keywords :
micro-optomechanical devices; microactuators; optical design techniques; optical fabrication; optical tuning; photonic band gap; photonic crystals; MEMS electrothermal actuators; chevron electrothermal actuators; high-index silicon rod; low-index SU-8; mechanical force; mechanical stress; mechanically tunable flexible photonic crystal; optical design; optical fabrication; photonic band structure; photonic crystal periodicity; Actuators; Frequency; Lattices; Lenses; Magnetic analysis; Micromechanical devices; Photonic crystals; Polymers; Refractive index; Silicon on insulator technology; MEMS; Photonic crystal; SU-8; flexible; tunable;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
DOI :
10.1109/SENSOR.2009.5285373
