Title :
Ultra-low power metal-oxide gas sensor on plastic foil
Author :
Courbat, J. ; Briand, D. ; Yue, L. ; Raible, S. ; de Rooij, N.F.
Author_Institution :
Sensors, Actuators & Microsyst. Lab. (SAMLAB), Ecole Polytech. Fed. de Lausanne (EPFL), Neuchatel, Switzerland
Abstract :
We report on the design and fabrication of ultra-low power metal-oxide (MOX) gas sensors on plastic foils envisioning their fabrication at large scale and low cost. A complete sensor solution is presented including its packaging at the foil level and the driving/readout circuitry. The latter allowed the sensor to operate in pulsed temperature mode to reduce the power consumption in the sub-mW range. Gas measurements under CO, CH4 and NO2 have proven the proper operation of the sensor. These devices are being developed targeting wireless applications.
Keywords :
carbon compounds; driver circuits; electronics packaging; gas sensors; nitrogen compounds; plastic packaging; readout electronics; CH4; CH4 gas measurement; CO; CO gas measurement; MOX gas sensor; NO2; NO2 gas measurement; driving circuitry; low power metal-oxide gas sensor; packaging; plastic foil; pulsed temperature mode measurements; readout circuitry; Circuits; Costs; Energy consumption; Fabrication; Gas detectors; Large-scale systems; Packaging; Plastics; Temperature distribution; Temperature sensors; Low-power; drop-coated; foil level packaging; gas sensor; metal-oxide; plastic foil; polyimide; readout circuitry;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
DOI :
10.1109/SENSOR.2009.5285392
