Title :
A novel method of self-assembling siloxane bi-layer directly on SiO2 surface of micro-cantilever for long-term repeatable sensing to trace explosives
Author :
Chen, Ying ; Xu, Pengcheng ; Liu, Yongjing ; Yang, Tiantian ; Yang, Yongliang ; Li, Xinxin
Author_Institution :
State Key Lab. of Transducer Technol., Chinese Acad. of Sci., Shanghai, China
Abstract :
The paper reports a novel static cantilever sensor (surface-stress-style) with long-term repeatable detecting sensitivity to trace TNT vapor. A siloxane-based TNT-sensitive bi-layer is self-assembled directly on the SiO2 surface of the surface-stress-style micro-cantilever. This method is, for the first time, used to replace the traditional self-assembled monolayers (SAMs) of thiols on Au (111) surface to solve the problem of the long-term instable Au-S bond.
Keywords :
cantilevers; explosives; gas sensors; microsensors; organic compounds; self-assembly; silicon compounds; SiO2; TNT vapor; repeatable detecting sensitivity; self-assembling siloxane bilayer; static cantilever sensor; surface-stress-style microcantilever; trace explosive sensing; Bonding; Chromium; Explosives; Fabrication; Gold; Piezoresistance; Piezoresistive devices; Self-assembly; Stability; Transducers; Micro-cantilever; long-term stability; self-assembled bi-layer; siloxane; trace explosive sensor;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
DOI :
10.1109/SENSOR.2009.5285396
