Title :
The research of designing technology for microelectromechanical filter
Author :
Gong, Huaimin ; Huang, Dagui ; Tan, Xianji ; Chen, Min
Author_Institution :
Sch. of Mechatronics Eng., Electron. Sci. & Technol. Univ., Chengdu, China
Abstract :
Microelectromechanical filters with high Q value, good signal-to-noise ratio, and stable temperature and aging characteristics are widely used in the communication system and other electronic device. It is a special filter using its resonators´ vibrating intrinsic frequency to filter. Microelectromechanical systems have potential application for microelectromechanical filter. This paper analyzed the microelectromechanical filter resonators and investigate its work principle. In this paper, the design of micromechanical filter is introduced, and related key techniques are discussed. The parameters of the structure designed are calculated.
Keywords :
electromechanical filters; micromechanical resonators; communication system; electronic device; intrinsic frequency vibration; microelectromechanical filter resonators; microelectromechanical systems; micromechanical filter; signal-to-noise ratio; Band pass filters; Bandwidth; Electric resistance; Geometry; Micromechanical devices; Optical coupling; Radio frequency; Resonant frequency; Resonator filters; Transceivers;
Conference_Titel :
Mechatronics and Automation, 2005 IEEE International Conference
Conference_Location :
Niagara Falls, Ont., Canada
Print_ISBN :
0-7803-9044-X
DOI :
10.1109/ICMA.2005.1626817