Title :
A MEMS turbopump for fuel delivery in small-scale power systems
Author :
Waits, C.M. ; McCarthy, M. ; Ghodssi, R.
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Maryland, College Park, MD, USA
Abstract :
The design, fabrication, and characterization of a microball bearing supported turbopump for fuel delivery in small-scale power systems are reported. A spiral-groove viscous pump is integrated with a microball bearing and a radial in-flow microturbine. Using water as the working fluid, pumping is demonstrated at rotational speeds, flow rates, and pressure rises of up to 10 krpm, 80 mL/hour, and 8.2 kPa, respectively. In addition, bearing and turbine performances are improved from previous work through design and fabrication changes, enabling continuous stable operation for over 4.5 million revolutions and maximum demonstrated speeds above 85 krpm.
Keywords :
fuel; microfabrication; micropumps; power systems; MEMS turbopump; fuel delivery; microball bearing; radial in-flow microturbine; small-scale power systems; spiral-groove viscous pump; Fabrication; Friction; Fuels; Micromechanical devices; Micromotors; Power system reliability; Power systems; Spinning; Turbines; Wafer bonding; Microball bearing; micropump; microturbine; turbopump;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
DOI :
10.1109/SENSOR.2009.5285407
