Title :
Gyroscope architecture with structurally forced anti-phase drive-mode and linearly coupled anti-phase sense-mode
Author :
Trusov, A.A. ; Schofield, A.R. ; Shkel, A.M.
Author_Institution :
Microsyst. Lab., Univ. of California, Irvine, CA, USA
Abstract :
This paper reports, for the first time, a vibratory MEMS z-axis rate gyroscope architecture with structurally forced anti-phase drive-mode and linearly coupled, dynamically balanced anti-phase sense-mode. The new design utilizes two symmetrically-decoupled tines with drive- and sense-mode synchronization mechanisms, and prioritizes sense-mode quality factor. The levered drive-mode mechanism structurally forces the anti-phase drive-mode motion and eliminates the lower frequency spurious modes. The linearly coupled, dynamically balanced antiphase sense-mode design minimizes substrate energy dissipation. SOI prototypes characterized in vacuum demonstrated drive-mode quality factor of 67,000 and ultra-high sense-mode quality factor of 125,000, yielding mechanical scale factor of 0.4 nm/(deg/h) for mode-matched operation.
Keywords :
gyroscopes; micromechanical devices; dynamically balanced antiphase sense-mode; gyroscope architecture; linearly coupled antiphase sense-mode; mode-matched operation; sense-mode quality factor; sense-mode synchronization mechanisms; structurally forced antiphase drive-mode; substrate energy dissipation; symmetrically-decoupled tines; ultra high sense mode quality factor; vibratory MEMS z-axis rate gyroscope architecture; Energy dissipation; Frequency synchronization; Gyroscopes; Laboratories; Micromechanical devices; Prototypes; Q factor; Resonant frequency; Torque; Vibrations; Vibratory gyroscope; high-Q design; tuning fork;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
DOI :
10.1109/SENSOR.2009.5285411
