• DocumentCode
    1851651
  • Title

    Energy loss in MEMS resonators and the impact on inertial and RF devices

  • Author

    Weinberg, Marc ; Candler, Rob ; Chandorkar, Saurabh ; Varsanik, Jonathan ; Kenny, Thomas ; Duwel, Amy

  • Author_Institution
    Charles Stark Draper Lab., Cambridge, MA, USA
  • fYear
    2009
  • fDate
    21-25 June 2009
  • Firstpage
    688
  • Lastpage
    695
  • Abstract
    In this paper, we review the current understanding of energy loss mechanisms in micromachined (MEMS and NEMS) devices. We describe the importance of high quality factor (Q) to the performance of MEMS gyros and MEMS resonators used in radio-frequency applications.
  • Keywords
    Q-factor; gyroscopes; micromechanical resonators; MEMS gyros; MEMS resonators; NEMS devices; RF devices; energy loss; inertial devices; micromachined devices; quality factor; radiofrequency applications; Capacitive sensors; Damping; Energy loss; Microelectromechanical devices; Micromechanical devices; Phonons; Q factor; Radio frequency; Solids; Vibrations;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
  • Conference_Location
    Denver, CO
  • Print_ISBN
    978-1-4244-4190-7
  • Electronic_ISBN
    978-1-4244-4193-8
  • Type

    conf

  • DOI
    10.1109/SENSOR.2009.5285418
  • Filename
    5285418
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1851651