Title :
Energy loss in MEMS resonators and the impact on inertial and RF devices
Author :
Weinberg, Marc ; Candler, Rob ; Chandorkar, Saurabh ; Varsanik, Jonathan ; Kenny, Thomas ; Duwel, Amy
Author_Institution :
Charles Stark Draper Lab., Cambridge, MA, USA
Abstract :
In this paper, we review the current understanding of energy loss mechanisms in micromachined (MEMS and NEMS) devices. We describe the importance of high quality factor (Q) to the performance of MEMS gyros and MEMS resonators used in radio-frequency applications.
Keywords :
Q-factor; gyroscopes; micromechanical resonators; MEMS gyros; MEMS resonators; NEMS devices; RF devices; energy loss; inertial devices; micromachined devices; quality factor; radiofrequency applications; Capacitive sensors; Damping; Energy loss; Microelectromechanical devices; Micromechanical devices; Phonons; Q factor; Radio frequency; Solids; Vibrations;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
DOI :
10.1109/SENSOR.2009.5285418
