• DocumentCode
    1851694
  • Title

    A fast rescheduling method in semiconductor manufacturing allowing for tardiness and scheduling stability

  • Author

    Cheng, Mingang ; Sugi, Masao ; Ota, Jun ; Yamamoto, Masashi ; Ito, Hiroki ; Inoue, Kazuyoshi

  • Author_Institution
    Dept. of Precision Eng., Tojyo Univ., Tokyo
  • fYear
    2006
  • fDate
    8-10 Oct. 2006
  • Firstpage
    100
  • Lastpage
    105
  • Abstract
    In semiconductor manufacturing, rescheduling problems are extremely difficult to solve in real time due to the high frequency of disturbances that occur approximately every minute. This paper proposes a new approach to online manufacturing rescheduling. Unlike the traditional methods to have a scheduling process again, we (1) revise the existing schedule to keep high schedule stability based on message passing rescheduling with operation sorting; and (2) during the manufacturing process, improve the performance of the revised schedule with the introduction of a quick local search on semi-critical paths. In actual problems with about 200,000 processes, this method can effectively accommodate disturbances in less than 1 second, and a better schedule can be obtained in less than 1 minute. This method has been demonstrated to be more effective than conventional dispatching-rule methods, some of which have been actually applied in many facilities, because it offers higher schedule stability and fewer violations of due dates
  • Keywords
    message passing; production control; scheduling; search problems; semiconductor device manufacture; fast rescheduling method; message passing rescheduling; online manufacturing rescheduling; operation sorting; quick local search; scheduling stability; semi-critical paths; semiconductor manufacturing; tardiness; Computer aided manufacturing; Job shop scheduling; Manufacturing automation; Manufacturing processes; Mathematical programming; Message passing; Processor scheduling; Production facilities; Semiconductor device manufacture; Stability;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Automation Science and Engineering, 2006. CASE '06. IEEE International Conference on
  • Conference_Location
    Shanghai
  • Print_ISBN
    1-4244-0310-3
  • Electronic_ISBN
    1-4244-0311-1
  • Type

    conf

  • DOI
    10.1109/COASE.2006.326862
  • Filename
    4120328