Title :
Performance Evaluation and Schedule Optimization of Multi-Cluster Tools with Process Times Uncertainty
Author :
Ding, Shengwei ; Yi, Jingang ; Zhang, Mike Tao ; Akhavan-Tabatabaei, Raha
Author_Institution :
Dept. of IE & OR, California Univ., Berkeley, CA
Abstract :
Performance evaluation and schedule optimization of cluster tools is challenging, especially when the process times are with uncertainty. In this paper, the critical path method (CPM) is used to analyze the throughput of multi-cluster tools with fixed action sequence. Slacks of non-critical path actions are studied and integrated to find the average cycle time of the cluster tool. A thin film tool from Novellus is used as an example to explain this methodology
Keywords :
critical path analysis; optimisation; scheduling; semiconductor device manufacture; Novellus; critical path method; fixed action sequence; multi-cluster tools; performance evaluation; process times uncertainty; schedule optimization; thin film tool; throughput analysis; Automation; Job shop scheduling; Optimal scheduling; Robots; Semiconductor device modeling; Steady-state; Throughput; Timing; USA Councils; Uncertainty;
Conference_Titel :
Automation Science and Engineering, 2006. CASE '06. IEEE International Conference on
Conference_Location :
Shanghai
Print_ISBN :
1-4244-0310-3
Electronic_ISBN :
1-4244-0311-1
DOI :
10.1109/COASE.2006.326864
