Modality analysis on PZT bimorph actuator

A PZT bimorph actuator of a micro robot is introduced in this paper, which is suited for inspecting the inner surface of small pipes with diameter of 20mm. The movement of this actuator is based on a particular principal called as "inertial-shock", so the modality analysis of it is very important. With different boundary conditions of PZT bimorph, the natural frequency of the actuator is analyzed based on finite element method in the paper. Tests indicate that the theoretical analysis results are basically close to the experiment. All these are the basis of design optimization of this kind of micro robot.