Title :
A large displacement piezodriven silicon XY-microstage
Author :
Sabri, Mohd Faizul Mohd ; Ono, Takahito ; Esashi, Masayoshi
Author_Institution :
Grad. Sch. of Eng., Tohoku Univ., Sendai, Japan
Abstract :
This paper present the fabrication and integration processes employed in order to realize the Si-PZT hybrid XY-microstage. A silicon XY-microstage with dimensions of 20 times 20 times 0.4 mm containing Moonie amplification mechanisms is fabricated and evaluated. The experimental results show that this microstage containing a commercial PZT actuator and Moonie angle of 2 degrees produced a displacement of 82 mum and 60 mum at 70 V for the X and Y directions, respectively. The fabricated microstage demonstrates that the designed amplification mechanism is able to magnify the stroke up to 18 times.
Keywords :
lead compounds; microactuators; micropositioning; silicon; Moonie amplification mechanisms; Moonie angle; PZT actuator; Si-PZT; Si-PZT hybrid XY-microstage; piezodriven silicon XY-microstage; Capacitive sensors; Electrostatic actuators; Fabrication; Low voltage; Mechanical engineering; Mechanical systems; Memory; Silicon; Springs; Substrates; Moonie amplification mechanism; PZT actuator; XY-microstage;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
DOI :
10.1109/SENSOR.2009.5285429
