Title :
Multifunctional nanowire array for chemical sensing and manipulation
Author :
Park, I. ; Ko, S.-H. ; Li, Z. ; Pisano, A.P. ; Grigoropoulos, C.P.
Author_Institution :
Mech. Eng. Dept., KAIST, Daejeon, South Korea
Abstract :
We have developed high density, integrated nanowire array devices that can be used for multiple purposes - chemical sensing and manipulation of chemical reactions at nanoscale. High density silicon nanowire (SiNW) sensor array allows electrical addressing of each individual nanowire for localized sensing and chemical reaction control at high spatial resolution. At the low voltage mode (50-100 mV), they can be used for the real-time chemical detection (pH level, alkali metal ions, and protein / DNA molecules). Also, at high voltage mode (3-30 V), electrical potential across SiNWs creates highly localized Joule heating for the nanoheater applications such as thermal ablation and crosslinking of polymeric materials and localized chemical synthesis of one dimensional nanostructures.
Keywords :
DNA; chemical reactions; chemical sensors; nanowires; pH measurement; proteins; sensor arrays; silicon; Joule heating; Si; alkali metal ions; chemical detection; chemical manipulation; chemical reactions; chemical sensing; electrical addressing; high density silicon nanowire; low voltage mode; multifunctional nanowire array; pH level; polymeric materials; protein/DNA molecules; sensor array; thermal ablation; Chemical sensors; DNA; Electric potential; Low voltage; Nanoscale devices; Proteins; Resistance heating; Sensor arrays; Silicon; Spatial resolution; Semiconductor nanowires; chemical sensing; localized chemical reaction; nanoheater; nanowire sensors;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
DOI :
10.1109/SENSOR.2009.5285461