An anti-adhesion technique reducing particle-loss using electrodynamic distrurbance for aerodynamic chip

This paper reports an electrodynamic anti-adhesion technique to detach particles adhered to the wall of microchannels. Electrodynamic disturbance is generated by applying electric potential at the frequency of 100 Hz to the interdigitated electrodes integrated at the bottom of the microchannel. Polystyrene latexes, ranging in diameter from 0.5 to 1.1 mum, were supplied to the microchannel. Before applying electric potential, particles adhered to the wall about 80% and only 20% of the supplied particles arrived at the outlet. By applying electric potential 1 to 3 kV, outlet concentrations was increased and particle loss was decreased by 36% at 1.1 mum.