Title :
Micromachined tube-type of Si droplet generator
Author :
Hida, H. ; Inagaki, N. ; Koyama, M. ; Shikida, M. ; Sato, K.
Author_Institution :
Dept. of Micro-Nano Syst. Eng., Nagoya Univ., Nagoya, Japan
Abstract :
We developed the novel type of droplet generator for the bio-chemical reactions, and designed it by considering Reynolds and Weber numbers. The Si droplet generator was fabricated on a silicon-on-insulator wafer by using deep-reactive ion etching and was fixed in a piece of heat-shrinkable tubing by heating the tubing. We experimentally confirmed that the fabricated droplet generator formed droplets in 1 mm diameter with jetting.
Keywords :
biochemistry; drops; micromachining; silicon-on-insulator; sputter etching; Reynolds numbers; Weber numbers; biochemical reactions; deep-reactive ion etching; droplet generator; heat-shrinkable tubing; silicon-on-insulator wafer; Design engineering; Etching; Fabrication; Glass; Micromechanical devices; Petroleum; Resists; Silicon compounds; Silicon on insulator technology; Systems engineering and theory; D-RIE process; Droplet; Reynolds number; SOI;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
DOI :
10.1109/SENSOR.2009.5285483
