Title :
Microfabricated neural thermocouple arrays probe for brain research
Author :
Lee, B.C. ; Lim, Y.-G. ; Kim, K.-H. ; Lee, S. ; Moon, S.
Author_Institution :
Nano-Bio Res. Center, KIST, Seoul, South Korea
Abstract :
A microfabricated neural thermocouple arrays probe (NTAP) is proposed for measuring and comparing the temperature of local brain area in real time sensing. Four junctions of T type thin film thermocouple arrays were fabricated on a sharp silicon probe tip. Each junction size was 20 mum by 20 mum. The average seebeck coefficient was 15.12 muV/oC and the dynamic response time was 0.78 sec. The temperature of both inside and outside the mouse´s thalamus was measured. The result showed that the temperature inside the mouse´s thalamus was about 4degC higher than that of the outside.
Keywords :
Seebeck effect; bioMEMS; biomedical measurement; biothermics; brain; elemental semiconductors; microfabrication; neurophysiology; silicon; temperature measurement; thermocouples; Si; T type thin film thermocouple; brain area; dynamic response; mouse thalamus; neural thermocouple array probe microfabrication; real-time sensing; silicon probe; size 20 mum; temperature 4 degC; temperature measurement; time 0.78 s; Fluorescence; Infrared detectors; Mice; Micromechanical devices; Monitoring; Needles; Probes; Silicon on insulator technology; Temperature measurement; Temperature sensors; Brain Research; MEMS; Mouse´s Thalamus; Neural Thermocouple Arrays Probe;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
DOI :
10.1109/SENSOR.2009.5285495
