Title :
Longitudinal bulk a coustic mass sensor
Author :
Hales, J.H. ; Teva, J. ; Boisen, A. ; Davis, Z.J.
Author_Institution :
DTU Nanotech., Tech. Univ. of Denmark, Lyngby, Denmark
Abstract :
Design, fabrication and characterization, in terms of mass sensitivity, is presented for a polycrystalline silicon longitudinal bulk acoustic cantilever. The device is operated in air at 51 MHz, resulting in a mass sensitivity of 100 HZ/fg (1 fg = 10-15 g). The initial characterization is conducted by depositing a minute mass by means of focused ion beam. The total noise in the currently applied measurement system allows for a mass resolution of 0.4 fg in air.
Keywords :
acoustic resonators; bulk acoustic wave devices; cantilevers; elemental semiconductors; micromechanical resonators; microsensors; silicon; Si; focused ion beam; frequency 51 MHz; longitudinal bulk acoustic cantilever; longitudinal bulk acoustic mass sensor; mass sensitivity; mechanical resonators; polycrystalline silicon; Acoustic devices; Acoustic sensors; Acoustic signal detection; Capacitive sensors; Fabrication; Resonance; Resonant frequency; Sensor arrays; Sensor phenomena and characterization; Silicon; Bulk acoustic resonator; MEMS; capacitive readout; mass sensor; silicon;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
DOI :
10.1109/SENSOR.2009.5285500
