Title :
A MEMS-based dual-axis tilt sensor using air medium
Author :
Choi, J.C. ; Park, C.M. ; Lee, J.K. ; Kong, S.H.
Author_Institution :
Sch. of Elec. Eng. & Comp. Sci., Kyungpook Nat. Univ., Daegu, South Korea
Abstract :
In this paper, a MEMS-based dual-axis tilt sensor, which utilizes a free-convection-based air medium, is fabricated and its operating characteristics are evaluated. The key components of the proposed tilt sensor, microheater and temperature sensors, are designed to have various patterns in order to examine an optimized geometry for achieving high sensitivity. Six different types of tilt sensors are fabricated and measured. The proposed tilt sensor operates in a wide detecting range of plusmn90deg on two axes. Output characteristics show excellent linearity and symmetric sensitivity. Fabrication sequence is also very simple owing to its monotonous structure and heater/sensor material, thus it fits mass production at a low cost.
Keywords :
convection; microfabrication; microsensors; temperature sensors; MEMS-based dual-axis tilt sensor; free-convection-based air medium; microheater; sensor fabrication; temperature sensor; Costs; Design optimization; Fabrication; Geometry; Linearity; Mass production; Sensor phenomena and characterization; Temperature sensors; Thermal sensors; Air medium; Convection; Inclinometer; MEMS; Tilt sensor;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
DOI :
10.1109/SENSOR.2009.5285505
