A MEMS-based dual-axis tilt sensor using air medium

Author

Choi, J.C. ; Park, C.M. ; Lee, J.K. ; Kong, S.H.

Author_Institution

Sch. of Elec. Eng. & Comp. Sci., Kyungpook Nat. Univ., Daegu, South Korea

fYear

2009

fDate

21-25 June 2009

Firstpage

300

Lastpage

303

Abstract

In this paper, a MEMS-based dual-axis tilt sensor, which utilizes a free-convection-based air medium, is fabricated and its operating characteristics are evaluated. The key components of the proposed tilt sensor, microheater and temperature sensors, are designed to have various patterns in order to examine an optimized geometry for achieving high sensitivity. Six different types of tilt sensors are fabricated and measured. The proposed tilt sensor operates in a wide detecting range of plusmn90deg on two axes. Output characteristics show excellent linearity and symmetric sensitivity. Fabrication sequence is also very simple owing to its monotonous structure and heater/sensor material, thus it fits mass production at a low cost.

Keywords

convection; microfabrication; microsensors; temperature sensors; MEMS-based dual-axis tilt sensor; free-convection-based air medium; microheater; sensor fabrication; temperature sensor; Costs; Design optimization; Fabrication; Geometry; Linearity; Mass production; Sensor phenomena and characterization; Temperature sensors; Thermal sensors; Air medium; Convection; Inclinometer; MEMS; Tilt sensor;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International

Conference_Location

Denver, CO

Print_ISBN

978-1-4244-4190-7

Electronic_ISBN

978-1-4244-4193-8

Type

conf

DOI

10.1109/SENSOR.2009.5285505

Filename

5285505